Tokyo
Japan
28
2015-10-08
The entities that hold a legal rights for patent applications filed by inventor WANG Xinming:
Xinming WANG from Tokyo, JP has applied for patents for these inventions. The list has both pending applications and granted patents:
METHOD AND APPARATUS FOR CLEANING SUBSTRATE
#2 | 2013-04-25SUBSTRATE CLEANING METHOD AND SUBSTRATE CLEANING APPARATUS
#3 | 2013-01-03SUBSTRATE CLEANING METHOD
#4 | 2012-12-20Substrate processing method and substrate processing unit
#5 | 2012-06-28CLEANING METHOD AND CLEANING APPARATUS
#6 | 2011-09-01Method and apparatus for cleaning substrate
#7 | 2010-12-30SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
#8 | 2010-04-29METHOD AND APPARATUS FOR PROCESSING SUBSTRATE
#9 | 2010-03-25SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME, AND PROCESSING LIQUID
#10 | 2009-01-01Substrate processing method and apparatus
#11 | 2008-07-24Apparatus and method for forming magnetic film
#12 | 2008-06-12Substrate Processing Method and Substrate Processing Apparatus
#13 | 2008-03-20Semiconductor Device and Method for Manufacturing the Same, and Processing Liquid
#14 | 2008-02-28Substrate Processing Method and Apparatus
#15 | 2008-02-19Plating apparatus and plating method
#16 | 2008-01-03Method and apparatus for processing substrate
#17 | 2007-11-20Plating apparatus
#18 | 2007-10-04Interconnects forming method and interconnects forming apparatus
#19 | 2007-09-27Substrate processing method and substrate processing apparatus
#20 | 2007-02-06Substrate processing apparatus and method
#21 | 2006-11-28Substrate processing apparatus and method
#22 | 2006-03-16Method and apparatus for forming metal film
#23 | 2005-11-03Method for processing substrate
#24 | 2005-09-22Wet processing method and processing apparatus of substrate
#25 | 2005-03-24Interconnects forming method and interconnects forming apparatus
#26 | 2005-02-03Substrate processing method and substrate processing apparatus
#27 | 2005-01-13Method and apparatus for forming capping film
#28 | 2005-01-13Substrate processing method
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