Eindhoven
Netherlands
11
2023-06-15
The entities that hold a legal rights for patent applications filed by inventor WARDENIER Peter Hanzen:
Peter Hanzen WARDENIER from Eindhoven, NL has applied for patents for these inventions. The list has both pending applications and granted patents:
Method and apparatus for inspection and metrology
#2 | 2020-04-23Method and system for increasing accuracy of pattern positioning
#3 | 2018-11-08Method and apparatus to correct for patterning process error
#4 | 2018-11-01Method and apparatus to reduce effects of nonlinear behavior
#5 | 2018-10-25Method and apparatus to correct for patterning process error
#6 | 2018-09-06Method and apparatus to correct for patterning process error
#7 | 2018-02-15Method and apparatus for inspection and metrology
#8 | 2016-12-22Method of metrology, inspection apparatus, lithographic system and device manufacturing method
#9 | 2016-06-23Method of measuring asymmetry, inspection apparatus, lithographic system and device manufacturing method
#10 | 2009-12-31Correction method for non-uniform reticle heating in a lithographic apparatus
#11 | 2007-08-02Lithographic projection apparatus and a device manufacturing method
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