Son M. Phi

City:

Milpitas, California

Country:

United States

Published Applications:

Last publication date:

2023-07-13

Top Assignees for applications by Son M. Phi

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Son M. Phi from Milpitas, US has applied for patents for these inventions. The list has both pending applications and granted patents:

Low temperature chuck for plasma processing systems

Low temperature chuck for plasma processing systems

LOW TEMPERATURE CHUCK FOR PLASMA PROCESSING SYSTEMS

WAFER PROFILE MODIFICATION THROUGH HOT/COLD TEMPERATURE ZONES ON PEDESTAL FOR SEMICONDUCTOR MANUFACTURING EQUIPMENT

InventorID:

1613638 ⎘