Morgan Hill, California
United States
19
2018-10-25
The entities that hold a legal rights for patent applications filed by inventor Silvetti Mario David:
Mario David Silvetti from Morgan Hill, US has applied for patents for these inventions. The list has both pending applications and granted patents:
Inner retaining ring and outer retaining ring for carrier head
#2 | 2016-08-18STAND ALONE ANNEAL SYSTEM FOR SEMICONDUCTOR WAFERS
#3 | 2016-08-04Wafer processing system with chuck assembly maintenance module
#4 | 2012-02-09SUBSTRATE EDGE TUNING WITH RETAINING RING
#5 | 2010-06-10METHOD FOR MONITORING THE POSITION OF A SEMICONDUCTOR PROCESSING ROBOT
#6 | 2009-04-09Apparatus and method for a multi-level load lock chamber, transfer chamber, and robot suitable for interfacing with same
#7 | 2009-03-12HIGH PRODUCTIVITY PLASMA PROCESSING CHAMBER
#8 | 2008-01-24Apparatus for reducing entrapment of foreign matter along a moveable shaft of a substrate support
#9 | 2007-12-20Multi-level load lock chamber, transfer chamber, and robot suitable for interfacing with same
#10 | 2007-06-28Method of retaining a substrate during a substrate transferring process
#11 | 2007-06-28Substrate gripper for a substrate handling robot
#12 | 2006-10-05METHOD FOR MONITORING THE POSITION OF A SEMICONDUCTOR PROCESSING ROBOT
#13 | 2006-08-17Cartesian robot design
#14 | 2005-10-27Universal mid-frequency matching network
#15 | 2005-10-20High productivity plasma processing chamber
#16 | 2005-08-11Apparatus for reducing entrapment of foreign matter along a moveable shaft of a substrate support
#17 | 2005-05-05Method and apparatus for monitoring the position of a semiconductor processing robot
#18 | 2005-04-14Substrate heater assembly
#19 | 2005-02-24Methods of reducing plasma-induced damage for advanced plasma CVD dielectrics
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