Eindhoven
Netherlands
16
2024-10-24
The entities that hold a legal rights for patent applications filed by inventor Kampen Maarten van:
Maarten van Kampen from Eindhoven, NL has applied for patents for these inventions. The list has both pending applications and granted patents:
APPARATUS AND METHOD FOR CLEANING AN INSPECTION SYSTEM
#2 | 2022-06-30Apparatus and method for cleaning an inspection system
#3 | 2021-03-18METHOD AND APPARATUS FOR FORMING A PATTERNED LAYER OF MATERIAL
#4 | 2018-10-25Radiation system and optical device
#5 | 2018-09-13Graphene spectral purity filter
#6 | 2017-01-19Pellicle for reticle and multilayer mirror
#7 | 2016-01-14Radiation source-collector and method for manufacture
#8 | 2015-07-09Lithographic apparatus and method of manufacturing a device
#9 | 2014-06-12Pellicle for reticle and multilayer mirror
#10 | 2013-05-09Components for EUV Lithographic Apparatus, EUV Lithographic Apparatus Including Such Components and Method for Manufacturing Such Components
#11 | 2013-04-11Lithographic apparatus and method
#12 | 2013-03-28Arrangement for use in a projection exposure tool for microlithography having a reflective optical element
#13 | 2012-08-09REFLECTIVE OPTICAL ELEMENT AND METHOD OF PRODUCING IT
#14 | 2012-07-05SPECTRAL PURITY FILTER, LITHOGRAPHIC APPARATUS, METHOD FOR MANUFACTURING A SPECTRAL PURITY FILTER AND METHOD OF MANUFACTURING A DEVICE USING LITHOGRAPHIC APPARATUS
#15 | 2011-02-17LITHOGRAPHIC APPARATUS, DEVICE MANUFACTURING METHOD, CLEANING SYSTEM AND METHOD FOR CLEANING A PATTERNING DEVICE
#16 | 2010-06-17System for Contactless Cleaning, Lithographic Apparatus and Device Manufacturing Method
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