Eindhoven
Netherlands
4
2019-03-21
The entities that hold a legal rights for patent applications filed by inventor Loopstra Erik:
Erik Loopstra from Eindhoven, NL has applied for patents for these inventions. The list has both pending applications and granted patents:
Position measurement of optical elements in a lithographic apparatus
#2 | 2013-03-28Arrangement for use in a projection exposure tool for microlithography having a reflective optical element
#3 | 2012-08-02Optical apparatus for use in photolithography
#4 | 2012-03-22Imaging optical system and projection exposure installation for microlithography with an imaging optical system of this type
163054 ⎘