Utrecht
Netherlands
13
2017-11-09
The entities that hold a legal rights for patent applications filed by inventor Labetski Dzmitry:
Dzmitry Labetski from Utrecht, NL has applied for patents for these inventions. The list has both pending applications and granted patents:
Radiation source and lithographic apparatus
#2 | 2015-11-26Radiation source and lithographic apparatus
#3 | 2015-10-15Droplet generator, EUV radiation source, lithographic apparatus, method for generating droplets and device manufacturing method
#4 | 2015-01-29Fuel stream generator, source collector apparatus and lithographic apparatus
#5 | 2015-01-01Radiation source and lithographic apparatus
#6 | 2013-04-11Collector mirror assembly and method for producing extreme ultraviolet radiation
#7 | 2013-03-28Radiation source
#8 | 2012-12-27Radiation Source, Lithographic Apparatus and Device Manufacturing Method
#9 | 2012-07-19Source collector, lithographic apparatus and device manufacturing method
#10 | 2011-07-07Radiation source and lithographic apparatus
#11 | 2010-09-16Radiation source, lithographic apparatus, and device manufacturing method
#12 | 2010-05-13Gas gauge, lithographic apparatus and device manufacturing method
#13 | 2010-04-08Source module, radiation source and lithographic apparatus
163066 ⎘