Sean M. Seutter

ELECTROSTATIC CHUCK WITH IMPROVED TEMPERATURE CONTROL

Selective Deposition of Thin Films with Improved Stability

DEUTERIUM-CONTAINING FILMS

Electrostatic chuck with improved temperature control

Deuterium-containing films

Amorphous silicon doped yttrium oxide films and methods of formation

ALUMINUM OXIDE PASSIVATION FOR SOLAR CELLS

HIGH EFFICIENCY SOLAR CELL STRUCTURES AND MANUFACTURING METHODS

LASER PROCESSING FOR SOLAR CELL BASE AND EMITTER REGIONS

SURFACE PASSIVATION OF HIGH-EFFICIENCY CRYSTALLINE SILICON SOLAR CELLS

SELF ALIGNED CONTACTS FOR SOLAR CELLS

HIGH-EFFICIENCY PHOTOVOLTAIC BACK-CONTACT SOLAR CELL STRUCTURES AND MANUFACTURING METHODS

Systems and methods for laser splitting and device layer transfer

Damage free laser patterning of transparent layers for forming doped regions on a solar cell substrate

ACTIVE BACKPLANE FOR THIN SILICON SOLAR CELLS

Aluminum oxide passivation and damage removal for solar cells

High-efficiency photovoltaic back-contact solar cell structures and manufacturing methods

Self Aligned Contacts for Solar Cells

Fabrication methods for monolithically isled back contact back junction solar cells

FABRICATION METHODS FOR BACK CONTACT SOLAR CELLS

ALUMINUM OXIDE PASSIVATION FOR SOLAR CELLS

LASER PROCESSING FOR SOLAR CELL BASE AND EMITTER REGIONS

Backplane reinforcement and interconnects for solar cells

HIGH-THROUGHPUT THERMAL PROCESSING METHODS FOR PRODUCING HIGH-EFFICIENCY CRYSTALLINE SILICON SOLAR CELLS

Metal foil metallization for backplane-attached solar cells and modules

SURFACE PASSIVATION OF HIGH-EFFICIENCY CRYSTALLINE SILICON SOLAR CELLS

BACK CONTACT SOLAR CELLS USING ALUMINUM-BASED ALLOY METALLIZATION

STRUCTURES AND METHODS OF FORMATION OF CONTIGUOUS AND NON-CONTIGUOUS BASE REGIONS FOR HIGH EFFICIENCY BACK-CONTACT SOLAR CELLS

HIGH EFFICIENCY SOLAR CELL STRUCTURES AND MANUFACTURING METHODS

HIGH-EFFICIENCY PHOTOVOLTAIC BACK-CONTACT SOLAR CELL STRUCTURES AND MANUFACTURING METHODS USING THREE-DIMENSIONAL SEMICONDUCTOR ABSORBERS

LASER ANNEALING APPLICATIONS IN HIGH-EFFICIENCY SOLAR CELLS

ACTIVE BACKPLANE FOR THIN SILICON SOLAR CELLS

High-efficiency photovoltaic back-contact solar cell structures and manufacturing methods using thin planar semiconductor absorbers

Backplane reinforcement and interconnects for solar cells

PASSIVATION METHODS AND APPARATUS FOR ACHIEVING ULTRA-LOW SURFACE RECOMBINATION VELOCITIES FOR HIGH-EFFICIENCY SOLAR CELLS

Multi-layer charge trap silicon nitride/oxynitride layer engineering with interface region control

Multi-Layer Charge Trap Silicon Nitride/Oxynitride Layer Engineering with Interface Region Control

CVD apparatus for improved film thickness non-uniformity and particle performance

Multi-zone resistive heater

METHOD FOR SILICON BASED DIELECTRIC CHEMICAL VAPOR DEPOSITION

SUBSTRATE HEATING METHOD AND APPARATUS

Apparatus for integrated gas and radiation delivery

METHOD AND APPARATUS FOR LOW TEMPERATURE AND LOW K SiBN DEPOSITION

Multi-zone resistive heater

INTEGRATION PROCESS OF TUNGSTEN ATOMIC LAYER DEPOSITION FOR METALLIZATION APPLICATION

Method and apparatus for the low temperature deposition of doped silicon nitride films

Method for treating substrates and films with photoexcitation

Method for silicon based dielectric deposition and clean with photoexcitation

Method for silicon based dielectric chemical vapor deposition

METHOD FOR FORMING SILICON-CONTAINING MATERIALS DURING A PHOTOEXCITATION DEPOSITION PROCESS

Apparatus and method for the deposition of silicon nitride films

Silicon nitride film with stress control

Method for silicon nitride chemical vapor deposition

Thermal chemical vapor deposition of silicon nitride using BTBAS bis(tertiary-butylamino silane) in a single wafer chamber