Tokyo
Japan
15
2023-02-09
The entities that hold a legal rights for patent applications filed by inventor ABE Tsubasa:
Tsubasa ABE from Tokyo, JP has applied for patents for these inventions. The list has both pending applications and granted patents:
COMPOSITION, METHOD OF FORMING RESIST UNDERLAYER FILM, AND METHOD OF FORMING RESIST PATTERN
#2 | 2022-06-23COMPOSITION, RESIST UNDERLAYER FILM, METHOD OF FORMING FILM, METHOD OF PRODUCING PATTERNED SUBSTRATE, AND COMPOUND
#3 | 2021-09-16COMPOSITION, RESIST UNDERLAYER FILM, AND RESIST PATTERN-FORMING METHOD
#4 | 2020-01-09Composition for resist underlayer film formation, resist underlayer film and formation method thereof, and patterned substrate production method
#5 | 2019-08-08Composition for resist underlayer film formation, resist underlayer film and forming method thereof, production method of patterned substrate, and compound
#6 | 2019-03-28Composition for film formation, film, resist underlayer film-forming method, production method of patterned substrate, and compound
#7 | 2018-12-06Composition for resist underlayer film formation, resist underlayer film and method for producing patterned substrate
#8 | 2018-04-26COMPOSITION FOR FILM FORMATION, FILM, PRODUCTION METHOD OF PATTERNED SUBSTRATE, AND COMPOUND
#9 | 2018-02-15Resist underlayer film-forming composition, resist underlayer film, resist underlayer film-forming process, and production method of patterned substrate
#10 | 2017-06-01Composition for film formation, film, production method of patterned substrate, and compound
#11 | 2017-05-18COMPOSITION FOR RESIST UNDERLAYER FILM FORMATION, RESIST UNDERLAYER FILM, AND PRODUCTION METHOD OF PATTERNED SUBSTRATE
#12 | 2017-04-11Composition for film formation, film, production method of patterned substrate, and compound
#13 | 2016-10-27Method for film formation, and pattern-forming method
#14 | 2016-09-08COMPOSITION FOR RESIST UNDERLAYER FILM FORMATION, RESIST UNDERLAYER FILM, AND PRODUCTION METHOD OF PATTERNED SUBSTRATE
#15 | 2013-06-06Capacitor device and method for manufacturing same
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