Yohei Eto

City:

Tokyo

Country:

Japan

Published Applications:

Last publication date:

2022-12-22

Top Assignees for applications by Yohei Eto

The entities that hold a legal rights for patent applications filed by inventor Eto Yohei:

Yohei Eto from Tokyo, JP has applied for patents for these inventions. The list has both pending applications and granted patents:

SUBSTRATE CLEANING DEVICE AND SUBSTRATE PROCESSING DEVICE

Carrier device, work processing apparatus, control method of carrier device and storage medium storing program

Apparatus for cleaning substrate and substrate cleaning method

Heat exchanger for regulating surface temperature of a polishing pad, polishing apparatus, polishing method, and medium storing computer program

Apparatus and method for regulating surface temperature of polishing pad

Substrate transfer hand

InventorID:

1648203 ⎘