Mountain View, California
United States
13
2019-05-23
The entities that hold a legal rights for patent applications filed by inventor BANTHIA Vikash:
Vikash BANTHIA from Mountain View, US has applied for patents for these inventions. The list has both pending applications and granted patents:
Methods of reducing or eliminating defects in tungsten film
#2 | 2018-06-07Process kit design for in-chamber heater and wafer rotating mechanism
#3 | 2017-05-25Methods for forming low-resistance contacts through integrated process flow systems
#4 | 2017-04-27Substrate processing apparatus and methods
#5 | 2016-09-22Methods for etching via atomic layer deposition (ALD) cycles
#6 | 2011-06-23METHODS OF THIN FILM PROCESS
#7 | 2008-07-31Methods of thin film process
#8 | 2008-05-22GAP-FILL DEPOSITIONS INTRODUCING HYDROXYL-CONTAINING PRECURSORS IN THE FORMATION OF SILICON CONTAINING DIELECTRIC MATERIALS
#9 | 2007-09-13MULTI-STEP ANNEAL OF THIN FILMS FOR FILM DENSIFICATION AND IMPROVED GAP-FILL
#10 | 2007-01-04MULTI-STEP ANNEAL OF THIN FILMS FOR FILM DENSIFICATION AND IMPROVED GAP-FILL
#11 | 2006-03-02Gap-fill depositions introducing hydroxyl-containing precursors in the formation of silicon containing dielectric materials
#12 | 2006-02-09Multi-step anneal of thin films for film densification and improved gap-fill
#13 | 2005-06-30Gap-fill depositions in the formation of silicon containing dielectric materials
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