Kyoto-shi
Japan
20
2021-11-25
The entities that hold a legal rights for patent applications filed by inventor KATO Shinichi:
Shinichi KATO from Kyoto-shi, JP has applied for patents for these inventions. The list has both pending applications and granted patents:
THERMAL PROCESSING APPARATUS
#2 | 2019-10-10Light-irradiation heat treatment method and heat treatment apparatus
#3 | 2019-07-04Heat treatment method and heat treatment apparatus for heating substrate by irradiating substrate with light
#4 | 2019-04-11Light irradiation type heat treatment method and heat treatment apparatus
#5 | 2019-01-24Light-irradiation heat treatment method and heat treatment apparatus
#6 | 2017-11-30Semiconductor manufacturing method and semiconductor manufacturing apparatus
#7 | 2017-10-26Light irradiation type heat treatment method and heat treatment apparatus
#8 | 2017-08-03METHOD FOR FORMING JUNCTION IN SEMICONDUCTOR
#9 | 2017-03-02Light-irradiation heat treatment method and heat treatment apparatus
#10 | 2017-03-02Light irradiation type heat treatment method and heat treatment apparatus
#11 | 2017-01-12Apparatus and method for light-irradiation heat treatment
#12 | 2016-08-25Heat treatment method and heat treatment apparatus for heating substrate by irradiating substrate with light
#13 | 2016-03-17Semiconductor manufacturing method and semiconductor manufacturing apparatus
#14 | 2015-08-06HEAT TREATMENT METHOD AND HEAT TREATMENT APPARATUS FOR HEATING SUBSTRATE BY IRRADIATING SUBSTRATE WITH LIGHT
#15 | 2015-07-23Substrate treatment method
#16 | 2013-12-19Heat treatment method and heat treatment apparatus for heating substrate by irradiating substrate with light
#17 | 2013-03-28Heat treatment method for growing silicide
#18 | 2013-03-28Heat treatment method for promoting crystallization of high dielectric constant film
#19 | 2013-03-28Heat treatment method and heat treatment apparatus of thin film
#20 | 2012-09-27Heat treatment method and heat treatment apparatus for heating substrate by irradiating substrate with light
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