Eindhoven
Netherlands
7
2016-10-06
The entities that hold a legal rights for patent applications filed by inventor Kok Martinus Joseph:
Martinus Joseph Kok from Eindhoven, NL has applied for patents for these inventions. The list has both pending applications and granted patents:
Inspection apparatus for measuring properties of a target structure, methods of operating an optical system, method of manufacturing devices
#2 | 2011-07-21Inspection method and apparatus
#3 | 2011-06-16Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method
#4 | 2011-05-12Support structure, inspection apparatus, lithographic apparatus and methods for loading and unloading substrates
#5 | 2010-09-02Device manufacturing method with angular-resolved spectroscopic lithography characterization
#6 | 2008-10-30Apparatus for angular-resolved spectroscopic lithography characterization
#7 | 2008-01-03Apparatus for angular-resolved spectroscopic lithography characterization and device manufacturing method
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