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Inventor profile of:

Yusuke AOKI

City:

Miyagi

Country:

Japan

Published Applications:

Last publication date:

2023-08-24

Top Assignees for applications by Yusuke AOKI

The entities that hold a legal rights for patent applications filed by inventor AOKI Yusuke:

TOKYO ELECTRON LIMITED 10 Tokyo, Japan

Recent patent applications by AOKI Yusuke

Yusuke AOKI from Miyagi, JP has applied for patents for these inventions. The list has both pending applications and granted patents:

#1 | 2023-08-24

US20230268165A1

Electricity

PLASMA PROCESSING APPARATUS AND STORAGE MEDIUM

#2 | 2023-05-04

US20230138006A1

Electricity

CLEANING METHOD, SUBSTRATE PROCESSING METHOD AND PLASMA PROCESSING APPARATUS

#3 | 2022-06-23

US20220199363A1

Electricity

PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD

#4 | 2022-05-05

US20220139752A1

Electricity

Plasma processing method and plasma processing apparatus

#5 | 2022-02-24

US20220059385A1

Electricity

Substrate processing method and substrate processing apparatus

#6 | 2021-02-25

US20210057212A1

Electricity

Method of processing substrate, device manufacturing method, and plasma processing apparatus

#7 | 2020-12-24

US20200402805A1

Electricity

Plasma processing method and plasma processing apparatus

#8 | 2020-08-20

US20200266036A1

Electricity

Apparatus and method for plasma processing

#9 | 2020-07-23

US20200234925A1

Electricity

Plasma processing apparatus and plasma processing method

#10 | 2020-06-18

US20200194238A1

Electricity

STRUCTURE FOR SUBSTRATE PROCESSING APPARATUS

#11 | 2016-10-20

US20160307741A1

Electricity

Method for surface treatment of upper electrode, plasma processing apparatus and upper electrode

InventorID:

1687328 ⎘