Eindhoven
Netherlands
5
2022-10-20
The entities that hold a legal rights for patent applications filed by inventor LI Hua:
Hua LI from Eindhoven, NL has applied for patents for these inventions. The list has both pending applications and granted patents:
Method of designing an alignment mark
#2 | 2021-07-08Bandwidth calculation system and method for determining a desired wavelength bandwidth for a measurement beam in a mark detection system
#3 | 2016-11-03Method of adjusting speed and/or routing of a table movement plan and a lithographic apparatus
#4 | 2012-01-05Method of adjusting speed and/or routing of a table movement plan and a lithographic apparatus
#5 | 2010-08-26Lithographic apparatus, a method of controlling the apparatus and a device manufacturing method
1699579 ⎘