Stuttgart
Germany
14
2025-04-17
The entities that hold a legal rights for patent applications filed by inventor NEUBER Andreas:
Andreas NEUBER from Stuttgart, DE has applied for patents for these inventions. The list has both pending applications and granted patents:
METHOD AND SYSTEM FOR DETECTING ANOMALIES IN A SEMICONDUCTOR PROCESSING SYSTEM
#2 | 2024-03-07SMART MANUFACTURING SOLUTIONS FOR WASTEWATER TREATMENT
#3 | 2022-10-27Method and system for detecting anomalies in a semiconductor processing system
#4 | 2022-10-20Method for controlling a processing system
#5 | 2019-12-05Method for controlling a processing system
#6 | 2017-11-09Gas panel apparatus and method for reducing exhaust requirements
#7 | 2016-11-10Method for controlling a processing system
#8 | 2012-08-16Method and apparatus for controlling a processing system
#9 | 2012-06-07Process tool chemical and gas usage optimization
#10 | 2012-04-19METHODS AND APPARATUS FOR RECOVERY AND REUSE OF REAGENTS
#11 | 2011-03-24POINT OF USE RECYCLING SYSTEM FOR CMP SLURRY
#12 | 2011-02-03METHODS AND APPARATUS FOR PROCESS ABATEMENT WITH RECOVERY AND REUSE OF ABATEMENT EFFLUENT
#13 | 2010-09-30FACTORY RESOURCE OPTIMIZATION IDENTIFICATION PROCESS AND SYSTEM
#14 | 2010-04-22METHODS AND APPARATUS FOR RECOVERING HEAT FROM PROCESSING SYSTEMS
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