Satoru SHIMURA

City:

Koshi-Shi

Country:

Japan

Published Applications:

Last publication date:

2016-11-10

Top Assignees for applications by Satoru SHIMURA

The entities that hold a legal rights for patent applications filed by inventor SHIMURA Satoru:

Satoru SHIMURA from Koshi-Shi, JP has applied for patents for these inventions. The list has both pending applications and granted patents:

Exposure apparatus, resist pattern forming method, and storage medium

InventorID:

1706306 ⎘