Gilroy, California
United States
3
2018-01-25
The entities that hold a legal rights for patent applications filed by inventor GREGOR MARIUSCH J.:
MARIUSCH J. GREGOR from Gilroy, US has applied for patents for these inventions. The list has both pending applications and granted patents:
Methods for monitoring a flow controller coupled to a process chamber
#2 | 2013-04-18Methods for monitoring a flow controller coupled to a process chamber
#3 | 2013-04-04Methods for in-situ calibration of a flow controller
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