Austin, Texas
United States
3
2014-05-22
The entities that hold a legal rights for patent applications filed by inventor Sawada Ikuo:
Ikuo Sawada from Austin, US has applied for patents for these inventions. The list has both pending applications and granted patents:
CAPACITIVELY COUPLED PLASMA EQUIPMENT WITH UNIFORM PLASMA DENSITY
#2 | 2014-05-22CAPACITIVELY COUPLED PLASMA EQUIPMENT WITH UNIFORM PLASMA DENSITY
#3 | 2013-04-04RADICAL PASSING DEVICE AND SUBSTRATE PROCESSING APPARATUS
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