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Inventor profile of:

Peter Paul HEMPENIUS

City:

Nuenen

Country:

Netherlands

Published Applications:

Last publication date:

2021-05-20

Top Assignees for applications by Peter Paul HEMPENIUS

The entities that hold a legal rights for patent applications filed by inventor HEMPENIUS Peter Paul:

ASML Netherlands B.V. 12 Veldhoven, Netherlands

Recent patent applications by HEMPENIUS Peter Paul

Peter Paul HEMPENIUS from Nuenen, NL has applied for patents for these inventions. The list has both pending applications and granted patents:

#1 | 2021-05-20

US20210151282A1

Electricity

E-beam apparatus

#2 | 2020-09-24

US20200303158A1

Electricity

ELECTRON BEAM INSPECTION TOOL AND METHOD FOR POSITIONING AN OBJECT TABLE

#3 | 2020-09-10

US20200286707A1

Electricity

Charged particle beam apparatus, and systems and methods for operating the apparatus

#4 | 2020-06-18

US20200194222A1

Electricity

Stage apparatus suitable for electron beam inspection apparatus

#5 | 2019-11-07

US20190341224A1

Electricity

E-beam apparatus

#6 | 2018-09-20

US20180267410A1

Physics

Stage system and metrology tool

#7 | 2018-05-31

US20180149986A1

Physics

Lithographic apparatus, object positioning system and device manufacturing method

#8 | 2016-12-29

US20160377996A1

Physics

System for positioning an object in lithography

#9 | 2009-09-17

US20090231567A1

Physics

Lithographic apparatus having a chuck with a visco-elastic damping layer

#10 | 2009-08-06

US20090195763A1

Physics

Lithographic apparatus with actuator to compensate acoustic vibration

#11 | 2009-08-06

US20090195760A1

Physics

Lithographic apparatus, method and device manufacturing method

#12 | 2008-12-18

US20080309911A1

Physics

Stage system and lithographic apparatus comprising such a stage system

#13 | 2008-10-23

US20080259299A1

Physics

Lithographic apparatus and device manufacturing method

InventorID:

1750145 ⎘