Miyagi
Japan
4
2025-03-13
The entities that hold a legal rights for patent applications filed by inventor KIMURA Soichiro:
Soichiro KIMURA from Miyagi, JP has applied for patents for these inventions. The list has both pending applications and granted patents:
ETCHING METHOD AND PLASMA PROCESSING APPARATUS
#2 | 2025-03-13ETCHING METHOD AND PLASMA PROCESSING APPARATUS
#3 | 2018-08-16Plasma processing method and plasma processing apparatus
#4 | 2016-12-29Etching method
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