Inventor profile of:

Amit Kumar BANSAL

City:

Milpitas, California

Country:

United States

Published Applications:

56

Last publication date:

2025-11-27

Top Assignees for applications by Amit Kumar BANSAL

The entities that hold a legal rights for patent applications filed by inventor BANSAL Amit Kumar:

Recent patent applications by BANSAL Amit Kumar

Amit Kumar BANSAL from Milpitas, US has applied for patents for these inventions. The list has both pending applications and granted patents:

#1 | 2025-11-27
US20250361614A1
Chemistry; metallurgy

INCREASED LIFE SUBSTRATE SUPPORT ASSEMBLY

#2 | 2025-08-14
US20250257451A1
Chemistry; metallurgy

HIGH DENSITY AMORPHOUS CARBON FILM WITH REDUCED HYDROGEN CONTENT

#3 | 2025-06-19
US20250201534A1
Electricity

BAFFLE IMPLEMENTATION FOR IMPROVING BOTTOM PURGE GAS FLOW UNIFORMITY

#4 | 2024-11-07
US20240368756A1
Chemistry; metallurgy

CLEANING ASSEMBLIES FOR SUBSTRATE PROCESSING CHAMBERS

#5 | 2024-02-08
US20240044000A1
Chemistry; metallurgy

Faceplate having a curved surface

#6 | 2023-11-09
US20230360956A1
Electricity

COAXIAL LIFT DEVICE WITH DYNAMIC LEVELING

#7 | 2023-11-09
US20230360955A1
Electricity

COAXIAL LIFT DEVICE WITH DYNAMIC LEVELING

#8 | 2023-06-22
US20230193466A1
Chemistry; metallurgy

PECVD process

#9 | 2023-05-25
US20230162999A1
Electricity

EXTERNAL SUBSTRATE SYSTEM ROTATION IN A SEMICONDUCTOR PROCESSING SYSTEM

#10 | 2023-04-27
US20230128297A1
Electricity

Method and system for cleaning a process chamber

#11 | 2023-04-20
US20230123089A1
Chemistry; metallurgy

Faceplate having a curved surface

#12 | 2023-02-16
US20230047451A1
Chemistry; metallurgy

Isolator apparatus and methods for substrate processing chambers

#13 | 2022-12-22
US20220403520A1
Chemistry; metallurgy

GROUND PATH SYSTEMS FOR PROVIDING A SHORTER AND SYMMETRICAL GROUND PATH

#14 | 2022-09-29
US20220307129A1
Chemistry; metallurgy

Cleaning assemblies for substrate processing chambers

#15 | 2022-06-09
US20220181120A1
Electricity

SEMICONDUCTOR PROCESSING APPARATUS FOR HIGH RF POWER PROCESS

#16 | 2022-04-21
US20220119950A1
Chemistry; metallurgy

High temperature face plate for deposition application

#17 | 2022-03-31
US20220098729A1
Chemistry; metallurgy

SYSTEM AND METHOD OF CLEANING PROCESS CHAMBERS USING PLASMA

#18 | 2021-12-23
US20210395881A1
Chemistry; metallurgy

High temperature face plate for deposition application

#19 | 2021-12-16
US20210391147A1
Electricity

Radio frequency ground system and method

#20 | 2021-07-15
US20210217592A1
Electricity

CHAMBER DESIGN FOR SEMICONDUCTOR PROCESSING

#21 | 2021-05-27
US20210159094A1
Electricity

UNIVERSAL ADJUSTABLE BLOCKER PLATE FOR FLOW DISTRIBUTION TUNING

#22 | 2021-04-15
US20210111000A1
Electricity

METHOD AND APPARATUS OF ACHIEVING HIGH INPUT IMPEDANCE WITHOUT USING FERRITE MATERIALS FOR RF FILTER APPLICATIONS IN PLASMA

#23 | 2021-02-04
US20210032748A1
Chemistry; metallurgy

RADIO FREQUENCY POWER RETURN PATH

#24 | 2021-01-07
US20210002763A1
Chemistry; metallurgy

Isolator apparatus and methods for substrate processing chambers

#25 | 2020-12-24
US20200399756A1
Chemistry; metallurgy

PECVD process

#26 | 2020-12-10
US20200388470A1
Electricity

Baffle implementation for improving bottom purge gas flow uniformity

#27 | 2020-12-10
US20200385862A1
Chemistry; metallurgy

Faceplate having a curved surface

#28 | 2020-10-15
US20200328066A1
Electricity

PLASMA DENSIFICATION WITHIN A PROCESSING CHAMBER

#29 | 2020-08-20
US20200263301A1
Chemistry; metallurgy

Showerhead assembly with multiple fluid delivery zones

#30 | 2020-08-06
US20200251311A1
Electricity

Method and system for cleaning a process chamber

#31 | 2020-07-09
US20200216952A1
Chemistry; metallurgy

Pumping apparatus and method for substrate processing chambers

#32 | 2020-05-21
US20200161093A1
Electricity

Device and method for tuning plasma distribution using phase control

#33 | 2020-04-02
US20200105573A1
Electricity

Coaxial lift device with dynamic leveling

#34 | 2020-03-05
US20200075353A1
Electricity

Gas input system for a substrate processing chamber

#35 | 2020-02-06
US20200043723A1
Electricity

On stack overlay improvement for 3D NAND

#36 | 2020-02-06
US20200043704A1
Electricity

Gas box for CVD chamber

#37 | 2020-02-06
US20200040452A1
Chemistry; metallurgy

Faceplate with embedded heater

#38 | 2020-01-30
US20200035522A1
Electricity

External substrate system rotation in a semiconductor processing system

#39 | 2020-01-09
US20200013586A1
Electricity

SEMICONDUCTOR PROCESSING APPARATUS FOR HIGH RF POWER PROCESS

#40 | 2019-12-19
US20190382889A1
Chemistry; metallurgy

TECHNIQUE TO ENABLE HIGH TEMPERATURE CLEAN FOR RAPID PROCESSING OF WAFERS

#41 | 2019-11-28
US20190360100A1
Chemistry; metallurgy

Ground path systems for providing a shorter and symmetrical ground path

#42 | 2019-07-04
US20190206706A1
Electricity

Temperature measurement in multi-zone heater

#43 | 2019-07-04
US20190203350A1
Chemistry; metallurgy

Plasma corrision resistive heater for high temperature processing

#44 | 2019-05-23
US20190153592A1
Chemistry; metallurgy

Shadow ring for modifying wafer edge and bevel deposition

#45 | 2019-04-25
US20190122872A1
Electricity

System and method for substrate processing chambers

#46 | 2019-04-04
US20190100839A1
Chemistry; metallurgy

Showerhead assembly with multiple fluid delivery zones

#47 | 2019-03-14
US20190080916A1
Electricity

Bottom and side plasma tuning having closed loop control

#48 | 2019-03-14
US20190080889A1
Electricity

Method for cleaning a process chamber

#49 | 2018-09-13
US20180258535A1
Chemistry; metallurgy

PECVD process

#50 | 2018-03-22
US20180082866A1
Electricity

Heater pedestal assembly for wide range temperature control

#51 | 2018-03-08
US20180066364A1
Chemistry; metallurgy

PECVD process

#52 | 2017-10-26
US20170309528A1
Electricity

Dynamic wafer leveling/tilting/swiveling steps for use during a chemical vapor deposition process

#53 | 2017-06-08
US20170162385A1
Electricity

Wafer rotation in a semiconductor chamber

#54 | 2017-03-09
US20170069464A1
Electricity

Method and apparatus of achieving high input impedance without using ferrite materials for RF filter applications in plasma chambers

#55 | 2017-03-02
US20170062218A1
Electricity

Methods to improve in-film particle performance of amorphous boron-carbon hardmask process in PECVD system

#56 | 2017-01-19
US20170016118A1
Chemistry; metallurgy

PECVD process

InventorID:

1773661 ⎘