Bangalore
India
4
2020-08-27
The entities that hold a legal rights for patent applications filed by inventor Math Ananda Seelavanth:
Ananda Seelavanth Math from Bangalore, IN has applied for patents for these inventions. The list has both pending applications and granted patents:
Bolted wafer chuck thermal management systems and methods for wafer processing systems
#2 | 2019-04-11Bolted wafer chuck thermal management systems and methods for wafer processing systems
#3 | 2017-08-10Bolted wafer chuck thermal management systems and methods for wafer processing systems
#4 | 2017-02-09Bolted wafer chuck thermal management systems and methods for wafer processing systems
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