Stefan Buhl

City:

Dresden

Country:

Germany

Published Applications:

Last publication date:

2021-06-24

Top Assignees for applications by Stefan Buhl

The entities that hold a legal rights for patent applications filed by inventor Buhl Stefan:

Stefan Buhl from Dresden, DE has applied for patents for these inventions. The list has both pending applications and granted patents:

Wafer exposure method using wafer models and wafer fabrication assembly

Lithographic apparatus and method of controlling a lithographic apparatus

Method and apparatus for simulation of lithography overlay

Process control method for lithographically processed semiconductor devices

Method for processing of a further layer on a semiconductor wafer

Method of manufacturing semiconductor devices by using sampling plans

Method for assessing the usability of an exposed and developed semiconductor wafer

InventorID:

1806570 ⎘