Eindhoven
Netherlands
6
2023-01-26
The entities that hold a legal rights for patent applications filed by inventor KERSSEMAKERS Sander:
Sander KERSSEMAKERS from Eindhoven, NL has applied for patents for these inventions. The list has both pending applications and granted patents:
Vessel for a radiation source
#2 | 2017-03-30Lithographic apparatus
#3 | 2011-07-21Inspection method and apparatus
#4 | 2011-06-16Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method
#5 | 2011-05-12Support structure, inspection apparatus, lithographic apparatus and methods for loading and unloading substrates
#6 | 2008-01-03Apparatus for angular-resolved spectroscopic lithography characterization and device manufacturing method
1837635 ⎘