Eindhoven
Netherlands
7
2024-01-18
The entities that hold a legal rights for patent applications filed by inventor VAN BEUZEKOM Aart Adrianus:
Aart Adrianus VAN BEUZEKOM from Eindhoven, NL has applied for patents for these inventions. The list has both pending applications and granted patents:
GRIPPER AND LITHOGRAPHIC APPARATUS COMPRISING THE GRIPPER
#2 | 2020-12-17Lithographic apparatus and method
#3 | 2019-12-26Lithographic apparatus, method of transferring a substrate and device manufacturing method
#4 | 2017-04-20Lithographic apparatus, method of transferring a substrate and device manufacturing method
#5 | 2009-11-19Substrate handler, lithographic apparatus and device manufacturing method
#6 | 2007-08-02Lithographic apparatus, device manufacturing method and exchangeable optical element
#7 | 2007-01-11Substrate handler, lithographic apparatus and device manufacturing method
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