Eindhoven
Netherlands
4
2017-04-27
The entities that hold a legal rights for patent applications filed by inventor SCHAAP Peter:
Peter SCHAAP from Eindhoven, NL has applied for patents for these inventions. The list has both pending applications and granted patents:
Method for compensating for an exposure error, a device manufacturing method, a substrate table, a lithographic apparatus, a control system, a method for measuring reflectivity and a method for measuring a dose of EUV radiation
#2 | 2007-08-02Lithographic apparatus, device manufacturing method and exchangeable optical element
#3 | 2007-03-29Lithographic apparatus, device manufacturing method and device manufactured thereby
#4 | 2006-12-14Stage apparatus, lithographic apparatus and device manufacturing method
1859445 ⎘