William M. LU

City:

Sunnyvale, California

Country:

United States

Published Applications:

Last publication date:

2020-01-23

Top Assignees for applications by William M. LU

The entities that hold a legal rights for patent applications filed by inventor LU William M.:

William M. LU from Sunnyvale, US has applied for patents for these inventions. The list has both pending applications and granted patents:

Pre-conditioned chamber components

Protection of aluminum process chamber components

PRE-COATED SHIELD USING IN VHF-RF PVD CHAMBERS

Electrostatic chuck AlN dielectric repair

METHOD AND APPARATUS FOR REFURBISHING GAS DISTRIBUTION PLATE SURFACES

InventorID:

1884444 ⎘