Livermore, California
United States
4
2017-06-01
The entities that hold a legal rights for patent applications filed by inventor Moore Robert B.:
Robert B. Moore from Livermore, US has applied for patents for these inventions. The list has both pending applications and granted patents:
Method and apparatus for post exposure processing of photoresist wafers
#2 | 2009-03-12HIGH PRODUCTIVITY PLASMA PROCESSING CHAMBER
#3 | 2007-12-20Multi-level load lock chamber, transfer chamber, and robot suitable for interfacing with same
#4 | 2005-10-20High productivity plasma processing chamber
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