Eindhoven
Netherlands
16
2024-01-04
The entities that hold a legal rights for patent applications filed by inventor LIN Nan:
Nan LIN from Eindhoven, NL has applied for patents for these inventions. The list has both pending applications and granted patents:
METROLOGY APPARATUS BASED ON HIGH HARMONIC GENERATION AND ASSOCIATED METHOD
#2 | 2023-09-14AN ILLUMINATION SOURCE AND ASSOCIATED METROLOGY APPARATUS
#3 | 2022-12-01Illumination source and associated metrology apparatus
#4 | 2022-10-13AN IMPROVED HIGH HARMONIC GENERATION APPARATUS
#5 | 2019-07-11Apparatus for delivering gas and illumination source for generating high harmonic radiation
#6 | 2019-05-23HHG source, inspection apparatus and method for performing a measurement
#7 | 2019-02-14Methods and Apparatus for Determining the Position of a Spot of Radiation, Inspection Apparatus, Device Manufacturing Method
#8 | 2019-01-03Illumination source for an inspection apparatus, inspection apparatus and inspection method
#9 | 2018-09-20Apparatus for delivering gas and illumination source for generating high harmonic radiation
#10 | 2018-08-09Methods and apparatus for predicting performance of a measurement method, measurement method and apparatus
#11 | 2018-03-15Illumination source for an inspection apparatus, inspection apparatus and inspection method
#12 | 2018-01-11Illumination source for an inspection apparatus, inspection apparatus and inspection method
#13 | 2017-11-09Method and apparatus for generating illuminating radiation
#14 | 2017-11-02HHG source, inspection apparatus and method for performing a measurement
#15 | 2017-11-02Method and apparatus for determining the property of a structure, device manufacturing method
#16 | 2017-06-29Lithographic apparatus and method for performing a measurement
1916881 ⎘