Kyoto
Japan
8
2022-07-28
The entities that hold a legal rights for patent applications filed by inventor EDO Toru:
Toru EDO from Kyoto, JP has applied for patents for these inventions. The list has both pending applications and granted patents:
Substrate processing apparatus, substrate processing method, and non-transitory computer-readable storage medium
#2 | 2022-05-12Processing condition selection method, substrate processing method, substrate product production method, processing condition selecting device, computer program, and storage medium
#3 | 2020-12-03Substrate processing apparatus
#4 | 2019-01-31Substrate processing method and substrate processing device
#5 | 2019-01-31Substrate processing method and substrate processing device
#6 | 2017-08-24Substrate processing apparatus
#7 | 2016-03-24Substrate processing apparatus and substrate processing method
#8 | 2016-01-07Substrate treating apparatus and method of treating substrate
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