Frantisek BALON

City:

Buchs

Country:

Switzerland

Published Applications:

Last publication date:

2021-10-14

Top Assignees for applications by Frantisek BALON

The entities that hold a legal rights for patent applications filed by inventor BALON Frantisek:

Frantisek BALON from Buchs, CH has applied for patents for these inventions. The list has both pending applications and granted patents:

METHOD AND APARATUS FOR LOW PARTICLE PLASMA ETCHING

Plasma etch chamber and method of plasma etching

Vacuum treatment chamber and method of manufacturing a vacuum treated plate-shaped substrate

FILM STRESS UNIFORMITY CONTROL BY RF COUPLING AND WAFER MOUNT WITH ADAPTED RF COUPLING

InventorID:

1972984 ⎘