Yozo Nagata

City:

Mie

Country:

Japan

Published Applications:

Last publication date:

2017-09-21

Top Assignees for applications by Yozo Nagata

The entities that hold a legal rights for patent applications filed by inventor Nagata Yozo:

Yozo Nagata from Mie, JP has applied for patents for these inventions. The list has both pending applications and granted patents:

Control device, substrate processing system, substrate processing method, and program

InventorID:

1991073 ⎘