Tsuneyuki OKABE

City:

Iwate

Country:

Japan

Published Applications:

Last publication date:

2017-09-28

Top Assignees for applications by Tsuneyuki OKABE

The entities that hold a legal rights for patent applications filed by inventor OKABE Tsuneyuki:

Tsuneyuki OKABE from Iwate, JP has applied for patents for these inventions. The list has both pending applications and granted patents:

Substrate processing apparatus, gas supply method, substrate processing method, and film forming method

Gas supplying apparatus, cylinder cabinet provided with the same, valve box, and substrate process apparatus

FILM DEPOSITION APPARATUS

FILM DEPOSITION APPARATUS AND FILM DEPOSITION METHOD

InventorID:

1994875 ⎘