Dan Marohl

Window Edge Heater for High Power Plasma Processing Applications

BALUN TRANSFORMER WITH ENHANCED RF COUPLING EMBEDDED IN HIGH-STRENGTH DIELECTRIC MATERIALS

COLLABORATIVE ROBOT SYSTEM ON A MOBILE CART WITH A CHAMBER DOCKING SYSTEM

TUNABLE ESC FOR RAPID ALTERNATING PROCESS APPLICATIONS

ADJUSTABLE DIELECTRIC CONSTANT CERAMIC WINDOW

Collaborative robot system on a mobile cart with a chamber docking system

CARRIER RING FOR FLOATING TCP CHAMBER GAS PLATE

COLD EDGE LOW TEMPERATURE ELECTROSTATIC CHUCK

THIN SHADOW RING FOR LOW-TILT TRENCH ETCHING

Selected Reject Band Non-Radiofrequency-Coupling Tile and Associated Methods and Systems

MID-CHAMBER FLOW OPTIMIZER

MULTIZONE GAS DISTRIBUTION PLATE FOR TRENCH PROFILE OPTIMIZATION

PLANAR MULTI-LAYER RADIO FREQUENCY FILTERS INCLUDING STACKED COILS WITH STRUCTURAL CAPACITANCE

SYSTEMS AND METHODS FOR USING A TRANSFORMER TO ACHIEVE UNIFORMITY IN PROCESSING A SUBSTRATE

SUBSTRATE SUPPORTS WITH INTEGRATED RF FILTERS

SEGMENTED GAS DISTRIBUTION PLATE FOR HIGH-POWER, HIGH-PRESSURE PROCESSES

Components and Processes for Managing Plasma Process Byproduct Materials

Substrate processing system including coil with RF powered faraday shield

COIL AND WINDOW FOR PLASMA PROCESSING SYSTEM

TUNABLE ESC FOR RAPID ALTERNATING PROCESS APPLICATIONS

Articulated direct-mount inductor and associated systems and methods

Universal non-invasive chamber impedance measurement system and associated methods

SYSTEMS AND METHODS FOR RF POWER RATIO SWITCHING FOR ITERATIVE TRANSITIONING BETWEEN ETCH AND DEPOSITION PROCESSES

SUBSTRATE PROCESSING SYSTEM INCLUDING COIL WITH RF POWERED FARADAY SHIELD

Method of depositing materials on a non-planar surface

Carrier used for deposition of materials on a non-planar surface

Electro-chemical deposition system