Eagle, Idaho
United States
4
2020-12-31
The entities that hold a legal rights for patent applications filed by inventor Coppa Brian J.:
Brian J. Coppa from Eagle, US has applied for patents for these inventions. The list has both pending applications and granted patents:
Controlling dry etch process characteristics using waferless dry clean optical emission spectroscopy
#2 | 2017-11-30Localized process control using a plasma system
#3 | 2017-10-05CONTROLLING DRY ETCH PROCESS CHARACTERISTICS USING WAFERLESS DRY CLEAN OPTICAL EMISSION SPECTROSCOPY
#4 | 2017-10-05Controlling dry etch process characteristics using waferless dry clean optical emission spectroscopy
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