Mark D. Smith

SYSTEM AND METHOD FOR OPTIMIZING THROUGH SILICON VIA OVERLAY

SYSTEM AND METHOD FOR DETERMINING POST BONDING OVERLAY

METHOD TO CALIBRATE, PREDICT, AND CONTROL STOCHASTIC DEFECTS IN EUV LITHOGRAPHY

METHOD TO CALIBRATE, PREDICT, AND CONTROL STOCHASTIC DEFECTS IN EUV LITHOGRAPHY

METHOD TO CALIBRATE, PREDICT, AND CONTROL STOCHASTIC DEFECTS IN EUV LITHOGRAPHY

SYSTEM AND METHOD FOR MITIGATING OVERLAY DISTORTION PATTERNS CAUSED BY A WAFER BONDING TOOL

METROLOGY TARGET DESIGN FOR TILTED DEVICE DESIGNS

PLASMA HYPERMODEL INTEGRATED WITH FEATURE-SCALE PROFILE MODEL FOR ACCELERATED ETCH PROCESS DEVELOPMENT

System and method for determining post bonding overlay

System and method for mitigating overlay distortion patterns caused by a wafer bonding tool

System and method for mitigating overlay distortion patterns caused by a wafer bonding tool

SYSTEM AND METHOD FOR DETECTING PARTICLE CONTAMINATION ON A BONDING TOOL

SYSTEM AND METHOD FOR OPTIMIZING THROUGH SILICON VIA OVERLAY

Process-induced displacement characterization during semiconductor production

System and method for wafer-by-wafer overlay feedforward and lot-to-lot feedback control

Process-induced displacement characterization during semiconductor production

Systems and methods for fabricating metrology targets with sub-resolution features

Layer-to-layer feedforward overlay control with alignment corrections

Systems and methods for focus-sensitive metrology targets

Metrology recipe generation using predicted metrology images

Process compatibility improvement by fill factor modulation

System and method for process-induced distortion prediction during wafer deposition

Method for computer modeling and simulation of negative-tone-developable photoresists

Systems and methods for automated multi-zone detection and modeling