Gyeonggi-do
South Korea
6
2021-04-01
The entities that hold a legal rights for patent applications filed by inventor HAN Sol:
Sol HAN from Gyeonggi-do, KR has applied for patents for these inventions. The list has both pending applications and granted patents:
CLEANING APPARATUS, CHEMICAL MECHANICAL POLISHING SYSTEM INCLUDING THE SAME, CLEANING METHOD AFTER CHEMICAL MECHANICAL POLISHING, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE INCLUDING THE SAME
#2 | 2018-11-01CLEANING APPARATUS, CHEMICAL MECHANICAL POLISHING SYSTEM INCLUDING THE SAME, CLEANING METHOD AFTER CHEMICAL MECHANICAL POLISHING, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE INCLUDING THE SAME
#3 | 2017-10-19Cleaning apparatus, chemical mechanical polishing system including the same, cleaning method after chemical mechanical polishing, and method of manufacturing semiconductor device including the same
#4 | 2016-02-04Etching composition
#5 | 2014-05-22Etching composition and method of manufacturing semiconductor device using the same
#6 | 2012-04-05Chemical mechanical polishing apparatus having pad conditioning disk and pre-conditioner unit
2016412 ⎘