🔗 Permalink

Inventor profile of:

Stefan Piehler

City:

Stuttgart

Country:

Germany

Published Applications:

Last publication date:

2026-06-04

Top Assignees for applications by Stefan Piehler

The entities that hold a legal rights for patent applications filed by inventor Piehler Stefan:

Trumpf Lasersystems For Semiconductor Manufacturing GmbH 3 Ditzingen, Germany
UNIVERSITAT STUTTGART 2 Stuttgart, Germany
ASML Netherlands B.V. 1 Veldhoven, Netherlands
ASML NETHERLANDS B. V. 1 Veldhoven, Netherlands

Recent patent applications by Piehler Stefan

Stefan Piehler from Stuttgart, DE has applied for patents for these inventions. The list has both pending applications and granted patents:

#1 | 2026-06-04

US20260153661A1

Physics

DEPOLARIZATION COMPENSATOR AND OPTICAL SYSTEM

#2 | 2026-01-22

US20260025900A1

Electricity

OBSERVATION DEVICE FOR AN EUV LIGHT SYSTEM, AND CORRESPONDING EUV LIGHT SYSTEM

#3 | 2025-06-19

US20250203746A1

Electricity

BEAM DIAPHRAGM, EUV LIGHT SOURCE, AND METHOD FOR OPERATING AN EUV LIGHT SOURCE

#4 | 2025-04-03

US20250113427A1

Electricity

EUV RADIATION GENERATION FOLLOWING LASER BEAM ROTATION

#5 | 2025-03-20

US20250093197A1

Physics

VIBRATION-MONITORED LASER OPTICAL UNIT

#6 | 2024-02-29

US20240074023A1

Electricity

EUV EXCITATION LIGHT SOURCE AND EUV LIGHT SOURCE

#7 | 2024-02-15

US20240057243A1

Electricity

EUV light source with a separation device

#8 | 2022-06-30

US20220206397A1

Physics

Laser focussing module

#9 | 2020-04-02

US20200106233A1

Electricity

METHOD AND APPARATUS FOR PRODUCING A RADIATION FIELD AMPLIFYING SYSTEM

#10 | 2018-03-08

US20180066983A1

Physics

Method and device for quantitatively sensing the power fraction of a radiation background of a pulsed laser

#11 | 2017-10-26

US20170310073A1

Electricity

Optical module, laser amplifier system, method and use

InventorID:

2023492 ⎘