Cupertino, California
United States
23
2025-04-03
The entities that hold a legal rights for patent applications filed by inventor Chen Lu:
Lu Chen from Cupertino, US has applied for patents for these inventions. The list has both pending applications and granted patents:
Method Of Forming A Metal Liner For Interconnect Structures
#2 | 2025-01-23Low Resistance and High Reliability Metallization Module
#3 | 2024-06-06METHODS AND APPARATUS FOR PRECLEANING AND TREATING WAFER SURFACES
#4 | 2023-05-04Conditioning treatment for ALD productivity
#5 | 2023-03-09Method of forming a metal liner for interconnect structures
#6 | 2023-03-09DOPED TANTALUM-CONTAINING BARRIER FILMS
#7 | 2022-10-27Ruthenium liner and cap for back-end-of-line
#8 | 2022-10-13Impurity removal in doped ALD tantalum nitride
#9 | 2022-06-09Reverse selective etch stop layer
#10 | 2022-04-21METHODS AND MATERIALS FOR ENHANCED BARRIER PERFORMANCE AND REDUCED VIA RESISTANCE
#11 | 2022-04-07Low resistance and high reliability metallization module
#12 | 2022-01-27Ruthenium liner and cap for back-end-of-line applications
#13 | 2021-12-30Impurity removal in doped ALD tantalum nitride
#14 | 2021-12-02Methods and apparatus for precleaning and treating wafer surfaces
#15 | 2021-11-11Doping of metal barrier layers
#16 | 2021-09-02Conditioning treatment for ALD productivity
#17 | 2020-11-05Selective deposition on non-metallic surfaces
#18 | 2020-11-05Reverse Selective Deposition
#19 | 2019-11-07Barrier for copper metallization and methods of forming
#20 | 2013-04-25Multiple complementary gas distribution assemblies
#21 | 2012-11-22Methods for pretreatment of group III-nitride depositions
#22 | 2012-11-22Methods for improved growth of group III nitride buffer layers
#23 | 2012-11-22Methods for improved growth of group III nitride semiconductor compounds
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