Mountain View, California
United States
15
2020-01-09
The entities that hold a legal rights for patent applications filed by inventor Agarwal Ankur:
Ankur Agarwal from Mountain View, US has applied for patents for these inventions. The list has both pending applications and granted patents:
Electrostatic chuck with variable pixelated magnetic field
#2 | 2019-11-14METHOD AND APPARATUS FOR ION ENERGY DISTRIBUTION MANIPULATION FOR PLASMA PROCESSING CHAMBERS THAT ALLOWS ION ENERGY BOOSTING THROUGH AMPLITUDE MODULATION
#3 | 2018-09-06Method and apparatus for ion energy distribution manipulation for plasma processing chambers that allows ion energy boosting through amplitude modulation
#4 | 2016-07-07Inductively coupled plasma apparatus
#5 | 2015-06-04Electrostatic chuck with variable pixelated magnetic field
#6 | 2013-08-22Synchronized radio frequency pulsing for plasma etching
#7 | 2013-05-30INDUCTIVELY COUPLED PLASMA APPARATUS
#8 | 2013-05-02Synchronous embedded radio frequency pulsing for plasma etching
#9 | 2013-05-02PLASMA REACTOR WITH CHAMBER WALL TEMPERATURE CONTROL
#10 | 2013-04-25ELECTRON BEAM PLASMA SOURCE WITH PROFILED CONDUCTIVE FINS FOR UNIFORM PLASMA GENERATION
#11 | 2012-11-01Methods and apparatus for controlling plasma in a process chamber
#12 | 2011-11-03Apparatus for radial delivery of gas to a chamber and methods of use thereof
#13 | 2011-04-28DUAL MODE INDUCTIVELY COUPLED PLASMA REACTOR WITH ADJUSTABLE PHASE COIL ASSEMBLY
#14 | 2011-04-28INDUCTIVELY COUPLED PLASMA APPARATUS
#15 | 2011-02-10Synchronized radio frequency pulsing for plasma etching
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