San Jose, California
United States
12
2024-05-16
The entities that hold a legal rights for patent applications filed by inventor KUMAR Surajit:
Surajit KUMAR from San Jose, US has applied for patents for these inventions. The list has both pending applications and granted patents:
APPARATUS AND METHOD FOR CMP TEMPERATURE CONTROL
#2 | 2023-09-21UNIFORM RADIATION HEATING CONTROL ARCHITECTURE
#3 | 2023-07-20BATCH THERMAL PROCESS CHAMBER
#4 | 2023-06-15GAS ENTRAINMENT DURING JETTING OF FLUID FOR TEMPERATURE CONTROL IN CHEMICAL MECHANICAL POLISHING
#5 | 2023-06-01WAFER EDGE TEMPERATURE CORRECTION IN BATCH THERMAL PROCESS CHAMBER
#6 | 2023-04-13Wafer heater with backside and integrated bevel purge
#7 | 2021-12-30Apparatus and method for CMP temperature control
#8 | 2021-12-30Gas entrainment during jetting of fluid for temperature control in chemical mechanical polishing
#9 | 2021-04-15Wafer Heater With Backside And Integrated Bevel Purge
#10 | 2021-03-18High quality factor embedded resonator wafers
#11 | 2020-02-06Liner for processing chamber
#12 | 2018-01-04QUARTZ UPPER AND LOWER DOMES
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