Inventor profile of:

JOHN PIPITONE

City:

Livermore, California

Country:

United States

Published Applications:

22

Last publication date:

2019-11-07

Top Assignees for applications by JOHN PIPITONE

The entities that hold a legal rights for patent applications filed by inventor PIPITONE JOHN:

Recent patent applications by PIPITONE JOHN

JOHN PIPITONE from Livermore, US has applied for patents for these inventions. The list has both pending applications and granted patents:

#1 | 2019-11-07
US20190338411A1
Chemistry; metallurgy

Physical vapor deposition with isotropic neutral and non-isotropic ion velocity distribution at the wafer surface

#2 | 2018-05-03
US20180119272A1
Chemistry; metallurgy

Physical vapor deposition system with a source of isotropic ion velocity distribution at the wafer surface

#3 | 2013-01-10
US20130008778A1
Chemistry; metallurgy

Physical vapor deposition chamber with capacitive tuning at wafer support

#4 | 2012-06-14
US20120149192A1
Chemistry; metallurgy

Methods for depositing metal in high aspect ratio features

#5 | 2012-02-02
US20120028461A1
Electricity

Methods for depositing metal in high aspect ratio features

#6 | 2010-04-22
US20100096261A1
Electricity

Physical vapor deposition reactor with circularly symmetric RF feed and DC feed to the sputter target

#7 | 2009-09-17
US20090229969A1
Chemistry; metallurgy

Physical vapor deposition method with a source of isotropic ion velocity distribution at the wafer surface

#8 | 2009-06-25
US20090159439A1
Chemistry; metallurgy

Apparatus for wafer level arc detection at an RF bias impedance match to the pedestal electrode

#9 | 2009-02-26
US20090053836A1
Chemistry; metallurgy

Method of wafer level transient sensing, threshold comparison and arc flag generation/deactivation

#10 | 2009-02-19
US20090045046A1
Chemistry; metallurgy

Method of multi-location ARC sensing with adaptive threshold comparison

#11 | 2009-02-19
US20090044750A1
Chemistry; metallurgy

Apparatus for wafer level arc detection at an electrostatic chuck electrode

#12 | 2009-02-19
US20090044748A1
Electricity

System with multi-location arc threshold comparators and communication channels for carrying arc detection flags and threshold updating

#13 | 2006-08-31
US20060191876A1
Electricity

Method of performing physical vapor deposition with RF plasma source power applied to the target using a magnetron

#14 | 2006-08-03
US20060172536A1
Electricity

Apparatus for plasma-enhanced physical vapor deposition of copper with RF source power applied through the workpiece

#15 | 2006-08-03
US20060172517A1
Electricity

Method for plasma-enhanced physical vapor deposition of copper with RF source power applied to the target

#16 | 2006-08-03
US20060169584A1
Electricity

Physical vapor deposition plasma reactor with RF source power applied to the target

#17 | 2006-08-03
US20060169582A1
Electricity

Physical vapor deposition plasma reactor with RF source power applied to the target and having a magnetron

#18 | 2006-08-03
US20060169578A1
Electricity

Apparatus for plasma-enhanced physical vapor deposition of copper with RF source power applied through the workpiece with a lighter-than-copper carrier gas

#19 | 2006-08-03
US20060169576A1
Electricity

Physical vapor deposition plasma reactor with VHF source power applied through the workpiece

#20 | 2006-04-06
US20060073700A1
Electricity

Method for forming a barrier layer in an integrated circuit in a plasma with source and bias power frequencies applied through the workpiece

#21 | 2006-04-06
US20060073690A1
Electricity

Apparatus and method for metal plasma vapor deposition and re-sputter with source and bias power frequencies applied through the workpiece

#22 | 2006-04-06
US20060073283A1
Electricity

Apparatus for metal plasma vapor deposition and re-sputter with source and bias power frequencies applied through the workpiece

InventorID:

21250 ⎘