Eindhoven
Netherlands
11
2024-10-31
The entities that hold a legal rights for patent applications filed by inventor Tarabrin Sergey:
Sergey Tarabrin from Eindhoven, NL has applied for patents for these inventions. The list has both pending applications and granted patents:
METROLOGY METHOD AND DEVICE
#2 | 2022-08-11Metrology method and associated computer product
#3 | 2022-03-17METHOD FOR METROLOGY OPTIMIZATION
#4 | 2020-09-10Method and apparatus to determine a patterning process parameter
#5 | 2020-06-18Method of measuring a parameter of a patterning process, metrology apparatus, target
#6 | 2019-12-05Measurement apparatus and method of measuring a target
#7 | 2019-10-24Method of determining a value of a parameter of interest of a target formed by a patterning process
#8 | 2019-05-02Method of determining a value of a parameter of interest, method of cleaning a signal containing information about a parameter of interest, device manufacturing method
#9 | 2019-05-02Metrology apparatus, method of measuring a structure, device manufacturing method
#10 | 2019-03-07Method and apparatus to determine a patterning process parameter
#11 | 2018-03-15Metrology method, apparatus and computer program
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