Inventor profile of:

Alok Ranjan

City:

Austin, Texas

Country:

United States

Published Applications:

99

Last publication date:

2026-03-12

Top Assignees for applications by Alok Ranjan

The entities that hold a legal rights for patent applications filed by inventor Ranjan Alok:

Recent patent applications by Ranjan Alok

Alok Ranjan from Austin, US has applied for patents for these inventions. The list has both pending applications and granted patents:

#1 | 2026-03-12
US20260074152A1
Electricity

APPARATUS FOR EDGE CONTROL DURING PLASMA PROCESSING

#2 | 2026-01-15
US20260018380A1
Electricity

PLASMA PROCESSING APPARATUS WITH TUNABLE ELECTRICAL CHARACTERISTIC

#3 | 2025-11-27
US20250364258A1
Electricity

PULSED CAPACITIVELY COUPLED PLASMA PROCESSES

#4 | 2025-11-06
US20250343049A1
Electricity

PLASMA PROCESSING METHODS USING LOW FREQUENCY BIAS PULSES

#5 | 2025-08-28
US20250273439A1
Electricity

METHOD OF UNIFORMITY CONTROL

#6 | 2025-05-08
US20250149295A1
Electricity

SYSTEMS AND METHODS OF CONTROL FOR PLASMA PROCESSING

#7 | 2025-03-06
US20250079178A1
Electricity

REMOTE SOURCE PULSING WITH ADVANCED PULSE CONTROL

#8 | 2025-03-06
US20250076771A1
Physics

Methods for Extreme Ultraviolet (EUV) Resist Patterning Development

#9 | 2025-01-16
US20250022689A1
Electricity

GAS CLUSTER ASSISTED PLASMA PROCESSING

#10 | 2024-11-28
US20240395507A1
Electricity

Topographic selective deposition

#11 | 2024-10-17
US20240347319A1
Electricity

SYSTEMS FOR REAL-TIME PULSE MEASUREMENT AND PULSE TIMING ADJUSTMENT TO CONTROL PLASMA PROCESS PERFORMANCE

#12 | 2024-10-17
US20240347317A1
Electricity

Method and System for Plasma Processing

#13 | 2024-06-06
US20240186149A1
Electricity

Methods for Etching Molybdenum

#14 | 2024-02-08
US20240049379A1
Electricity

PLASMA PROCESSING APPARATUS

#15 | 2023-12-21
US20230411116A1
Electricity

Plasma processing methods using multiphase multifrequency bias pulses

#16 | 2023-11-23
US20230377895A1
Electricity

PLASMA ETCHING USING MULTIPHASE MULTIFREQUENCY POWER PULSES AND VARIABLE DUTY CYCLING

#17 | 2023-11-23
US20230377853A1
Electricity

PLASMA SYSTEMS AND PROCESSES WITH PULSED MAGNETIC FIELD

#18 | 2023-11-23
US20230377849A1
Electricity

Method of uniformity control

#19 | 2023-11-09
US20230360889A1
Electricity

Apparatus for Edge Control During Plasma Processing

#20 | 2023-11-02
US20230352282A1
Electricity

Autonomous operation of plasma processing tool

#21 | 2023-10-26
US20230341781A1
Physics

Methods for extreme ultraviolet (EUV) resist patterning development

#22 | 2023-10-05
US20230317462A1
Electricity

Etching of polycrystalline semiconductors

#23 | 2023-07-20
US20230230814A1
Electricity

Method and Apparatus for Plasma Processing

#24 | 2023-06-15
US20230187214A1
Electricity

Remote source pulsing with advanced pulse control

#25 | 2023-04-20
US20230117812A1
Electricity

Plasma processing with radio frequency (RF) source and bias signal waveforms

#26 | 2023-03-16
US20230081352A1
Electricity

Pulsed Capacitively Coupled Plasma Processes

#27 | 2023-01-26
US20230021588A1
Electricity

Plasma processing apparatus

#28 | 2022-12-22
US20220406580A1
Electricity

Virtual metrology enhanced plasma process optimization method

#29 | 2022-12-08
US20220392773A1
Electricity

Etching metal during processing of a semiconductor structure

#30 | 2022-12-08
US20220392765A1
Electricity

Cyclic plasma processing

#31 | 2022-12-08
US20220392749A1
Electricity

Plasma Processing Apparatus with Tunable Electrical Characteristic

#32 | 2022-12-01
US20220384607A1
Electricity

Metal-containing liner process

#33 | 2022-11-17
US20220367149A1
Electricity

Methods for real-time pulse measurement and pulse timing adjustment to control plasma process performance

#34 | 2022-11-10
US20220359718A1
Electricity

SACRIFICIAL GATE CAPPING LAYER FOR GATE PROTECTION

#35 | 2022-10-27
US20220344162A1
Electricity

Method of forming a FET structure by selective deposition of film on source/drain contact

#36 | 2022-09-29
US20220310357A1
Electricity

Fast neutral generation for plasma processing

#37 | 2022-08-04
US20220246747A1
Electricity

Contact Etch Stop Layer with Improved Etch Stop Capability

#38 | 2022-08-04
US20220246438A1
Electricity

Cyclic plasma etch process

#39 | 2022-06-09
US20220181153A1
Electricity

Defect correction on metal resists

#40 | 2022-05-24
US17167199
Electricity

Methods for anisotropic etch of silicon-based materials with selectivity to organic materials

#41 | 2022-03-03
US20220068607A1
Electricity

Gas cluster assisted plasma processing

#42 | 2022-03-03
US20220068601A1
Electricity

Plasma processing systems and methods for chemical processing a substrate

#43 | 2022-03-01
US17037025
Electricity

Ion angle detector

#44 | 2022-02-24
US20220059358A1
Electricity

Pulsed capacitively coupled plasma processes

#45 | 2022-01-27
US20220028695A1
Electricity

Plasma Processing Methods Using Low Frequency Bias Pulses

#46 | 2021-09-23
US20210296132A1
Electricity

Method for dry etching compound materials

#47 | 2021-08-12
US20210249225A1
Electricity

Plasma processing methods using low frequency bias pulses

#48 | 2021-07-08
US20210210355A1
Electricity

Methods of Plasma Processing Using a Pulsed Electron Beam

#49 | 2021-05-20
US20210151296A1
Electricity

Mode-switching plasma systems and methods of operating thereof

#50 | 2021-03-18
US20210082668A1
Electricity

Plasma processing apparatuses including multiple electron sources

#51 | 2021-02-18
US20210050183A1
Electricity

Three-phase pulsing systems and methods for plasma processing

#52 | 2021-01-28
US20210027991A1
Electricity

Mode-switching plasma systems and methods of operating thereof

#53 | 2021-01-21
US20210020448A1
Electricity

Method and Structure for Smoothing Substrate Patterns or Surfaces

#54 | 2021-01-21
US20210020405A1
Electricity

EQUIPMENT AND METHODS FOR PLASMA PROCESSING

#55 | 2021-01-14
US20210013005A1
Electricity

Process control enabled VDC sensor for plasma process

#56 | 2020-12-03
US20200381261A1
Electricity

Method for dry etching compound materials

#57 | 2020-11-19
US20200365372A1
Electricity

Plasma processing apparatuses having a dielectric injector

#58 | 2020-11-19
US20200365369A1
Electricity

Apparatuses and methods for plasma processing

#59 | 2020-08-27
US20200273992A1
Electricity

Method for gate stack formation and etching

#60 | 2020-08-27
US20200273713A1
Electricity

Method of atomic layer etching of oxide

#61 | 2020-08-27
US20200273711A1
Electricity

Plasma etch processes

#62 | 2020-08-27
US20200273678A1
Electricity

Methods and systems for focus ring thickness determinations and feedback control

#63 | 2020-08-20
US20200266070A1
Electricity

Method for selective etching at an interface between materials

#64 | 2020-04-30
US20200135432A1
Electricity

Hybrid electron beam and RF plasma system for controlled content of radicals and ions

#65 | 2020-04-30
US20200135431A1
Electricity

Tailored electron energy distribution function by new plasma source: hybrid electron beam and RF plasma

#66 | 2020-04-02
US20200105510A1
Electricity

Methods for stability monitoring and improvements to plasma sources for plasma processing

#67 | 2020-03-05
US20200075734A1
Electricity

Surface modification process

#68 | 2020-03-05
US20200075346A1
Electricity

Apparatus and process for electron beam mediated plasma etch and deposition processes

#69 | 2020-03-05
US20200075293A1
Electricity

Method and apparatus for plasma processing

#70 | 2020-02-20
US20200058470A1
Electricity

Systems and methods of control for plasma processing

#71 | 2020-02-20
US20200058469A1
Electricity

Systems and methods of control for plasma processing

#72 | 2020-02-13
US20200051833A1
Electricity

Ruthenium hard mask process

#73 | 2020-01-02
US20200006081A1
Electricity

Method of isotropic etching of silicon oxide utilizing fluorocarbon chemistry

#74 | 2019-12-26
US20190393048A1
Electricity

Method for area-selective etching of silicon nitride layers for the manufacture of microelectronic workpieces

#75 | 2019-11-14
US20190348296A1
Electricity

Method of atomic layer etching of oxide

#76 | 2019-11-14
US20190348295A1
Electricity

Method of etching silicon nitride layers for the manufacture of microelectronic workpieces

#77 | 2019-10-17
US20190318916A1
Electricity

Method for ion mass separation and ion energy control in process plasmas

#78 | 2019-10-17
US20190318913A1
Electricity

Apparatus and Method for Controlling Ion Energy Distribution in Process Plasmas

#79 | 2019-10-03
US20190304750A1
Electricity

Advanced methods for plasma systems operation

#80 | 2019-08-22
US20190259623A1
Electricity

Method to achieve a sidewall etch

#81 | 2019-08-15
US20190252197A1
Electricity

Method of quasi-atomic layer etching of silicon nitride

#82 | 2019-05-09
US20190139779A1
Electricity

Method of conformal etching selective to other materials

#83 | 2019-03-28
US20190098740A1
Electricity

Plasma processing apparatus

#84 | 2019-03-14
US20190080926A1
Electricity

Methods of surface restoration for nitride etching

#85 | 2019-03-14
US20190080925A1
Electricity

Selective oxide etching method for self-aligned multiple patterning

#86 | 2019-03-14
US20190080924A1
Electricity

Selective nitride etching method for self-aligned multiple patterning

#87 | 2019-01-31
US20190035604A1
Electricity

SOLID-STATE SOURCE OF ATOMIC SPECIE FOR ETCHING

#88 | 2018-12-13
US20180358233A1
Electricity

Method of plasma etching of silicon-containing organic film using sulfur-based chemistry

#89 | 2018-11-08
US20180323045A1
Electricity

MANUFACTURING METHODS TO REDUCE SURFACE PARTICLE IMPURITIES AFTER A PLASMA PROCESS

#90 | 2018-11-01
US20180315616A1
Electricity

Method of cyclic plasma etching of organic film using carbon-based chemistry

#91 | 2018-11-01
US20180315615A1
Electricity

Method of cyclic plasma etching of organic film using sulfur-based chemistry

#92 | 2018-09-27
US20180277386A1
Electricity

Method of anisotropic extraction of silicon nitride mandrel for fabrication of self-aligned block structures

#93 | 2018-09-27
US20180277385A1
Electricity

Method of quasi-atomic layer etching of silicon nitride

#94 | 2018-09-13
US20180261462A1
Electricity

Method of quasi-atomic layer etching of silicon nitride

#95 | 2018-07-19
US20180204733A1
Electricity

Method of preferential silicon nitride etching using sulfur hexafluoride

#96 | 2018-05-17
US20180138018A1
Electricity

Dual-frequency surface wave plasma source

#97 | 2018-05-10
US20180130669A1
Electricity

Self-limiting cyclic etch method for carbon-based films

#98 | 2018-03-22
US20180082903A1
Electricity

Method of patterning intersecting structures

#99 | 2018-03-22
US20180082842A1
Electricity

Method of in situ hard mask removal

InventorID:

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