Berkeley, California
United States
18
2020-01-02
The entities that hold a legal rights for patent applications filed by inventor Venugopal Vijayakumar C.:
Vijayakumar C. Venugopal from Berkeley, US has applied for patents for these inventions. The list has both pending applications and granted patents:
Methods and apparatuses for plasma chamber matching and fault identification
#2 | 2019-07-18Processing chamber hardware fault detection using spectral radio frequency analysis
#3 | 2018-05-17Processing chamber hardware fault detection using spectral radio frequency analysis
#4 | 2016-01-14Apparatus and method for efficient materials use during substrate processing
#5 | 2012-04-26Automatic fault detection and classification in a plasma processing system and methods thereof
#6 | 2010-12-30Methods and apparatus for predictive preventive maintenance of processing chambers
#7 | 2010-12-30Determining plasma processing system readiness without generating plasma
#8 | 2010-12-30Arrangement for identifying uncontrolled events at the process module level and methods thereof
#9 | 2010-12-30Methods and apparatus to predict etch rate uniformity for qualification of a plasma chamber
#10 | 2010-12-30Arrangement for identifying uncontrolled events at the process module level and methods thereof
#11 | 2010-12-30Methods and arrangements for in-situ process monitoring and control for plasma processing tools
#12 | 2010-12-30SEASONING PLASMA PROCESSING SYSTEMS
#13 | 2010-12-30Methods for constructing an optimal endpoint algorithm
#14 | 2009-01-01Collimator arrangements including multiple collimators and implementation methods thereof
#15 | 2008-07-15Method for controlling a recess etch process
#16 | 2006-03-28Method for in-situ monitoring of patterned substrate processing using reflectometry.
#17 | 2006-02-16Process endpoint detection method using broadband reflectometry
#18 | 2005-12-27Process endpoint detection method using broadband reflectometry
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