Austin, Texas
United States
27
2019-03-28
The entities that hold a legal rights for patent applications filed by inventor Carcasi Michael A.:
Michael A. Carcasi from Austin, US has applied for patents for these inventions. The list has both pending applications and granted patents:
Methods for sensitizing photoresist using flood exposures
#2 | 2019-02-07Critical dimension control by use of a photo agent
#3 | 2018-11-01Chemical amplification methods and techniques for developable bottom anti-reflective coatings and dyed implant resists
#4 | 2017-11-16Critical dimension control by use of a photo agent
#5 | 2017-11-16Critical dimension control by use of photo-sensitized chemicals or photo-sensitized chemically amplified resist
#6 | 2017-07-06Methods and techniques to use with photosensitized chemically amplified resist chemicals and processes
#7 | 2016-12-08Techniques for Spin-on-Carbon Planarization
#8 | 2016-01-14Integration of absorption based heating bake methods into a photolithography track system
#9 | 2015-08-27Metrology for measurement of photosensitizer concentration within photo-sensitized chemically-amplified resist (PS-CAR)
#10 | 2015-08-27Methods and techniques to use with photosensitized chemically amplified resist chemicals and processes
#11 | 2015-08-27Chemical amplification methods and techniques for developable bottom anti-reflective coatings and dyed implant resists
#12 | 2015-08-27Mitigation of EUV shot noise replicating into acid shot noise in photo-sensitized chemically-amplified resist (PS-CAR)
#13 | 2014-09-18INTEGRATION OF ABSORPTION BASED HEATING BAKE METHODS INTO A PHOTOLITHOGRAPHY TRACK SYSTEM
#14 | 2014-09-18Chemi-epitaxy in directed self-assembly applications using photo-decomposable agents
#15 | 2014-09-18Method and apparatus for substrate rinsing and drying
#16 | 2013-10-31Method and system for controlling a spike anneal process
#17 | 2013-05-02METHOD OF SLIMMING RADIATION-SENSITIVE MATERIAL LINES IN LITHOGRAPHIC APPLICATIONS
#18 | 2011-10-06Method of slimming radiation-sensitive material lines in lithographic applications
#19 | 2011-10-06Method of slimming radiation-sensitive material lines in lithographic applications
#20 | 2010-08-19Multi-pitch scatterometry targets
#21 | 2009-10-01Method and heat treatment apparatus for uniformly heating a substrate during a bake process
#22 | 2008-10-02Methods and heat treatment apparatus for uniformly heating a substrate during a bake process
#23 | 2008-09-25APPARATUS AND METHODS FOR APPLYING A LAYER OF A SPIN-ON MATERIAL ON A SERIES OF SUBSTRATES
#24 | 2008-09-11Method for heating a chemically amplified resist layer carried on a rotating substrate
#25 | 2008-08-21Method and device for controlling temperature of a substrate using an internal temperature control device
#26 | 2008-04-03Apparatus and method for thermally processing a substrate with a heated liquid
#27 | 2007-04-19Gas jet reduction of iso-dense field thickness bias for gapfill process
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