Nirasaki City
Japan
7
2015-11-19
The entities that hold a legal rights for patent applications filed by inventor SATO Jun:
Jun SATO from Nirasaki City, JP has applied for patents for these inventions. The list has both pending applications and granted patents:
Film-forming method for forming silicon oxide film on tungsten film or tungsten oxide film
#2 | 2015-03-26Film-forming method for forming silicon oxide film on tungsten film or tungsten oxide film
#3 | 2014-07-17FILM-FORMING METHOD FOR FORMING SILICON OXIDE FILM ON TUNGSTEN FILM OR TUNGSTEN OXIDE FILM
#4 | 2014-01-02Film formation method, film formation apparatus and storage medium
#5 | 2013-05-02METHOD OF FORMING SILICON OXIDE FILM
#6 | 2012-06-28FILM-FORMING METHOD AND FILM-FORMING APPARATUS FOR FORMING SILICON OXIDE FILM ON TUNGSTEN FILM OR TUNGSTEN OXIDE FILM
#7 | 2012-06-21Slimming method of carbon-containing thin film and oxidation apparatus
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