Miyagi
Japan
19
2023-06-22
The entities that hold a legal rights for patent applications filed by inventor UEDA Takehiro:
Takehiro UEDA from Miyagi, JP has applied for patents for these inventions. The list has both pending applications and granted patents:
PLASMA PROCESSING APPARATUS
#2 | 2022-07-07VACUUM PROCESSING APPARATUS AND MAINTENANCE APPARATUS
#3 | 2022-04-07Substrate support, substrate processing apparatus, and substrate processing method
#4 | 2021-11-18Plasma processing apparatus
#5 | 2021-10-28SUBSTRATE SUPPORT ASSEMBLY, SUBSTRATE PROCESSING APPARATUS, AND SUBSTRATE PROCESSING METHOD
#6 | 2021-09-09Stage and plasma processing apparatus
#7 | 2020-12-24Maintenance device
#8 | 2020-11-19Substrate support and plasma processing apparatus
#9 | 2020-06-11Substrate support, substrate processing apparatus, substrate processing system, and method of detecting erosion of adhesive in substrate support
#10 | 2020-05-21Mounting table and charge neutralization method for target object
#11 | 2019-09-05VACUUM PROCESSING APPARATUS AND EXHAUST CONTROL METHOD
#12 | 2019-08-15Plasma processing apparatus
#13 | 2019-08-15Mounting apparatus for object to be processed and processing apparatus
#14 | 2019-06-27PLASMA ETCHING APPARATUS AND PLASMA ETCHING METHOD
#15 | 2019-06-06Support assembly and support assembly assembling method
#16 | 2019-01-10Gas cylinder
#17 | 2018-11-01PLASMA PROCESSING APPARATUS
#18 | 2018-08-16Vacuum processing apparatus and maintenance apparatus
#19 | 2018-07-05PLASMA PROCESSING APPARATUS
2236691 ⎘