Beverly, Massachusetts
United States
10
2024-01-25
The entities that hold a legal rights for patent applications filed by inventor Lu Jun:
Jun Lu from Beverly, US has applied for patents for these inventions. The list has both pending applications and granted patents:
APPARATUS, SYSTEM AND METHOD FOR ENERGY SPREAD ION BEAM
#2 | 2023-01-26Dual XY variable aperture in an ion implantation system
#3 | 2022-10-06Apparatus, system and method for energy spread ion beam
#4 | 2020-09-17Dual cathode ion source
#5 | 2019-12-19Dual cathode ion source
#6 | 2018-07-26Dual cathode ion source
#7 | 2018-05-22Dual cathode ion source
#8 | 2011-06-30System and method for controlling deflection of a charged particle beam within a graded electrostatic lens
#9 | 2005-12-01Uniformity control multiple tilt axes, rotating wafer and variable scan velocity
#10 | 2005-11-24Uniformity control using multiple fixed wafer orientations and variable scan velocity
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